Metal complexes containing cyclopentadienyl ligands
US11312730B2 · kind B2 · utility
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1References
19Claims
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Key dates
| Filing date | Nov 3, 2017 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Nov 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0228
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Metal complexes including cyclopentadienyl ligands and methods of using such metal complexes to prepare metal-containing films are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.