Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM
US11314205B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2018 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Nov 26, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2001/266
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A low-cost digital holography microscope (DHM) that is capable of performing inspection at high speed while accurately inspecting an inspection object at high resolution, an inspection method using the DHM, and a method of manufacturing a semiconductor device by using the DHM are provided. The DHM includes: a light source configured to generate and output light; a beam splitter configured to cause the light to be incident on an inspection object and output reflected light from the inspection object; and a detector configured to detect the reflected light, wherein, when the reflected light includes interference light, the detector generates a hologram of the interference light, and wherein no lens is present in a path from the light source to the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.