Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications
US11315757B2 · kind B2 · utility
1Cited by
13References
39Claims
0Family size
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Key dates
| Filing date | Aug 6, 2020 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Sep 25, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/327
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A radio frequency (RF) generator is configured to generate a RF signal. The RF signal can be modulated by a pulse having one or multiple states. During an initial state at pulse initiation, the RF generator adjusts the impedance match by selecting the frequency of the RF signal. During a second state of the pulse, the RF generator adjusts the impedance match using a matching network. The first state includes controlling the RF generator to output a power burst, and the second state includes controlling the generator to output an operating power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.