Dual gate and single actuator system
US11328943B2 · kind B2 · utility
1Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2020 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Apr 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67376
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a first gate, a second gate, a gate connector coupled to the first gate and to the second gate, and actuator coupled to the gate connector. The actuator is configured to seal the first gate against a first slot or open the first slot via vertical motion. The actuator is also configured to seal the second gate against a second slot or open the second slot via a combination of vertical motion and horizontal motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.