Prescriptive analytics in highly collinear response space
US11328964B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2019 |
| Grant date | May 10, 2022 |
| Priority date | — |
| Expiry date | Oct 11, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods, systems, and non-transitory computer readable medium are described for prescriptive analytics in highly collinear response space. A method includes receiving film property data associated with manufacturing parameters of manufacturing equipment. The method further includes determining that the film property data is correlated and is different from target data. The method further includes selecting a set of data points of the film property data that are orthogonal to the target data. The method further includes performing feature extraction on the set of data points. The method further includes determining, based on the feature extraction, updates to one or more of the manufacturing parameters to meet the target data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.