Sidharth Bhatia
21Patents
3h-index
42Co-inventors
59Inventor score
Filing activity: Jul 14, 2011 → Jan 9, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8664127B2 | Two silicon-containing precursors for gapfill enhancing dielectric liner | Electricity | 463 | Active |
| USD1045924S1 | Portion of a display panel with a graphical user interface | General | 4 | Active |
| USD1031743S1 | Portion of a display panel with a graphical user interface | General | 3 | Active |
| US8716154B2 | Reduced pattern loading using silicon oxide multi-layers | Electricity | 3 | Active |
| US11853042B2 | Part, sensor, and metrology data integration | Physics | 1 | Active |
| US11592812B2 | Sensor metrology data integration | Emerging Cross-Sectional Technologies | 1 | Active |
| US11328964B2 | Prescriptive analytics in highly collinear response space | Emerging Cross-Sectional Technologies | 1 | Active |
| US9589773B2 | In-situ etch rate determination for chamber clean endpoint | Electricity | 1 | Active |
| US10748797B2 | Plasma parameters and skew characterization by high speed imaging | Electricity | 1 | Active |
| US10790121B2 | Plasma density control on substrate edge | Electricity | 0 | Active |
| US11495440B2 | Plasma density control on substrate edge | Electricity | 0 | Active |
| US11120976B2 | Apparatus and methods for removing contaminant particles in a plasma process | Electricity | 0 | Active |
| US12366853B2 | Sensor metrology data integration | Emerging Cross-Sectional Technologies | 0 | Active |
| US12080519B2 | Smart dynamic load simulator for RF power delivery control system | Electricity | 0 | Active |
| US12074073B2 | Prescriptive analytics in highly collinear response space | Emerging Cross-Sectional Technologies | 0 | Active |
| US11545376B2 | Plasma parameters and skew characterization by high speed imaging | Electricity | 0 | Active |
| US11157661B2 | Process development visualization tool | Physics | 0 | Active |
| US10714319B2 | Apparatus and methods for removing contaminant particles in a plasma process | Electricity | 0 | Active |
| US11829873B2 | Predictive modeling of a manufacturing process using a set of trained inverted models | Emerging Cross-Sectional Technologies | 0 | Active |
| USD1045923S1 | Portion of a display panel with a graphical user interface | General | 0 | Active |
| US10755903B2 | RPS defect reduction by cyclic clean induced RPS cooling | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.