Light guide assembly for an electron microscope
US11335536B2 · kind B2 · utility
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3References
26Claims
0Family size
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Key dates
| Filing date | Sep 3, 2020 |
| Grant date | May 17, 2022 |
| Priority date | — |
| Expiry date | Sep 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2857
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.