Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room

US11353381B1 · kind B1 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Devendra Channappa Holeyannavar · Bengaluru, IN
• Dean C. Hruzek · Cedar Park, US
• Arunkumar Ramachandraiah · Savanuru, IN
• Jeffrey C. Hudgens · San Francisco, US
• Shivaraj Manjunath Nara · Bengaluru, IN
• Paul B. Reuter · Austin, US

Key dates

• Filing date: Jun 9, 2020
• Grant date: Jun 7, 2022
• Expiry date: Jun 9, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05K2201/10151
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A detector disc includes a disc body having a bottom disc and a top cover, the top cover including a first aperture. A sensor is disposed inside the disc body and positioned to be exposed to an external environment via the first aperture in the top cover. The solid state sensor is adapted to detect levels of chemical gas contaminants and output a detection signal based on detected levels of the chemical gas contaminants. A microcontroller is disposed on the PCB and adapted to generate measurement data from the detected levels of the chemical gas contaminants embodied within the detection signal. A wireless communication circuit is disposed on the PCB, the wireless communication circuit adapted to transmit the measurement data wirelessly to a wireless access point device.