Paul B. Reuter
54Patents
5h-index
60Co-inventors
71Inventor score
Filing activity: Feb 29, 2012 → Sep 25, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9355876B2 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Emerging Cross-Sectional Technologies | 434 | Active |
| US10204805B2 | Thin heated substrate support | Electricity | 9 | Active |
| US10090181B2 | Method and apparatus for substrate transfer and radical confinement | Electricity | 9 | Active |
| US10262884B2 | Systems, apparatus, and methods for an improved load port | Electricity | 7 | Active |
| US10446428B2 | Load port operation in electronic device manufacturing apparatus, systems, and methods | Electricity | 6 | Active |
| US11244844B2 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Electricity | 4 | Active |
| US11189511B2 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Electricity | 4 | Active |
| US11581203B2 | Systems for integrating load locks into a factory interface footprint space | Electricity | 3 | Active |
| US10278501B2 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Electricity | 2 | Active |
| US10453726B2 | Electronic device manufacturing load port apparatus, systems, and methods | Electricity | 2 | Active |
| US10566205B2 | Abatement and strip process chamber in a load lock configuration | Electricity | 2 | Active |
| US10541165B2 | Systems, apparatus, and methods for an improved load port backplane | Electricity | 1 | Active |
| US9464732B2 | Apparatus for uniform pumping within a substrate process chamber | Emerging Cross-Sectional Technologies | 1 | Active |
| US9587749B2 | Slit valve with a pressurized gas bearing | Emerging Cross-Sectional Technologies | 1 | Active |
| US11993978B2 | Seal mechanism for load port doors | Electricity | 1 | Active |
| US11081379B2 | Load port operation in electronic device manufacturing apparatus, systems, and methods | Electricity | 1 | Active |
| US10276354B2 | Segmented focus ring assembly | Chemistry; Metallurgy | 1 | Active |
| US11373891B2 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same | Electricity | 1 | Active |
| US10056274B2 | System and method for forming a sealed chamber | Electricity | 1 | Active |
| US10832928B2 | Systems, apparatus, and methods for an improved load port | Electricity | 1 | Active |
| US11640915B2 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Electricity | 0 | Active |
| US12159802B2 | Shortened load port for factory interface | Physics | 0 | Active |
| US11404297B2 | Systems, apparatus, and methods for an improved load port | Electricity | 0 | Active |
| US12140339B2 | Filter isolation for equipment front end module | Electricity | 0 | Active |
| US11353381B1 | Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.