Bandwidth calculation system and method for determining a desired wavelength bandwidth for a measurement beam in a mark detection system
US11360403B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2019 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | May 2, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7088
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a bandwidth calculation system for determining a desired wavelength bandwidth for a measurement beam in a mark detection system, the bandwidth calculation system comprising a processing unit configured to determine the desired wavelength bandwidth based on mark geometry information, e.g. comprising mark depth information representing a depth of a mark. In an embodiment the desired wavelength bandwidth is based on a period and/or a variance parameter of a mark detection error function. The invention further relates to a mark detection system, a position measurement system and a lithographic apparatus comprising the bandwidth calculation system, as well as a method for determining a desired wavelength bandwidth.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.