Jacob Klinkhamer
7Patents
2h-index
23Co-inventors
47Inventor score
Filing activity: Dec 29, 2003 → May 2, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6955074B2 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8164740B2 | Illumination system coherence remover with two sets of stepped mirrors | Physics | 2 | Active |
| US7781237B2 | Alignment marker and lithographic apparatus and device manufacturing method using the same | Physics | 1 | Expired |
| US7609362B2 | Scanning lithographic apparatus and device manufacturing method | Physics | 1 | Active |
| US7480028B2 | Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program | Physics | 1 | Expired |
| US8159651B2 | Illumination system coherence remover with a series of partially reflective surfaces | Physics | 0 | Active |
| US11360403B2 | Bandwidth calculation system and method for determining a desired wavelength bandwidth for a measurement beam in a mark detection system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.