Patent · US Active

Detecting backscattered electrons in a multibeam charged particle column

US11366072B2 · kind B2 · utility

4Cited by
10References
16Claims
0Family size

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Key dates

Filing dateMay 4, 2020
Grant dateJun 21, 2022
Priority date—
Expiry dateMay 4, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2817
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and a system for detecting backscattered electrons in a multi-beam electron column.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.