Alon Litman
33Patents
6h-index
43Co-inventors
69Inventor score
Filing activity: Jun 20, 1994 → May 14, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5644132A | System for high resolution imaging and measurement of topographic and material features on a specimen | Electricity | 61 | Expired |
| US7468506B2 | Spot grid array scanning system | Physics | 53 | Expired |
| US5466940A | Electron detector with high backscattered electron acceptance for particle beam apparatus | Electricity | 31 | Expired |
| US7468507B2 | Optical spot grid array scanning system | Physics | 29 | Expired |
| US7285779B2 | Methods of scanning an object that includes multiple regions of interest using an array of scanning beams | Electricity | 22 | Expired |
| US7098468B2 | Raster frame beam system for electron beam lithography | Electricity | 7 | Expired |
| US7842935B2 | Raster frame beam system for electron beam lithography | Electricity | 6 | Active |
| US7430104B2 | Electrostatic chuck for wafer metrology and inspection equipment | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7521700B2 | Raster frame beam system for electron beam lithography | Electricity | 5 | Active |
| US8207499B2 | Variable rate scanning in an electron microscope | Electricity | 5 | Active |
| US11366072B2 | Detecting backscattered electrons in a multibeam charged particle column | Electricity | 4 | Active |
| US9818577B2 | Multi mode system with a dispersion X-ray detector | Electricity | 4 | Active |
| US9666412B1 | Method for charging and imaging an object | Electricity | 4 | Active |
| US10903044B1 | Filling empty structures with deposition under high-energy SEM for uniform DE layering | Electricity | 4 | Active |
| US9466462B2 | Inspection of regions of interest using an electron beam system | Electricity | 2 | Active |
| US6914443B2 | Apparatus and method for enhanced voltage contrast analysis | Physics | 2 | Expired |
| US10211026B2 | Retractable detector | Electricity | 1 | Active |
| US10074513B2 | Multi mode systems with retractable detectors | Electricity | 1 | Active |
| US9632044B1 | Imaging bottom of high aspect ratio holes | Physics | 1 | Active |
| US10156785B2 | Inspection of a lithographic mask that is protected by a pellicle | Electricity | 0 | Active |
| US9470751B2 | Detecting open and short of conductors | Physics | 0 | Active |
| US9366954B2 | Inspection of a lithographic mask that is protected by a pellicle | Electricity | 0 | Active |
| US11315754B2 | Adaptive geometry for optimal focused ion beam etching | Electricity | 0 | Active |
| US11501951B1 | X-ray imaging in cross-section using un-cut lamella with background material | Electricity | 0 | Active |
| US9448253B2 | Determining a state of a high aspect ratio hole using measurement results from an electrostatic measurement device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.