Patent · US Active

Method for substrate registration and anchoring in inkjet printing

US11367643B2 · kind B2 · utility

1Cited by
2References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 2, 2020
Grant dateJun 21, 2022
Priority date
Expiry dateApr 29, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/68785
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for printing on a substrate includes printing a support structure by printing a liquid precursor material and curing the liquid precursor material, printing one or more alignment markers by printing the liquid precursor material outside the support structure and curing the liquid precursor material, positioning a substrate within the support structure, performing a registration of the substrate using the one or more alignment markers, and printing one or more device structures on the substrate while registered by printing and curing the liquid precursor material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.