Chuck top, inspection apparatus, and chuck top recovery method
US11385283B2 · kind B2 · utility
0Cited by
1References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 13, 2020 |
| Grant date | Jul 12, 2022 |
| Priority date | — |
| Expiry date | Jul 24, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a chuck top for use in an inspection apparatus which inspects a plurality of inspection target devices formed on a wafer. The chuck top is configured to be held by a frame during an inspection of the plurality of inspection target devices while holding the wafer, the chuck top being configured to be attachable to and detachable from an aligner. The chuck top includes a main body, and a drop prevention mechanism provided in the main body and including a movable drop prevention hook configured to prevent the chuck top from being dropped when the chuck top is detached from the frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.