Patent · US Active

Method and metrology apparatus for determining estimated scattered radiation intensity

US11392043B2 · kind B2 · utility

0Cited by

5References

7Claims

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Assignee

ASML NETHERLANDS B.V. · NL

Inventors

Seyed Iman Mossavat · Waalre, NL
Remco Dirks · Deurne, NL
Hendrik Jan Hidde Smilde · Veldhoven, NL

Key dates

Filing date	Aug 13, 2019
Grant date	Jul 19, 2022
Priority date	—
Expiry date	Sep 21, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70633
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of determining an estimated intensity of radiation scattered by a target illuminated by a radiation source, has the following steps: obtaining and training (402) a library REFLIB of wavelength-dependent reflectivity as a function of the wavelength, target structural parameters and angle of incidence R(λ,θ,x,y); determining (408) a wide-band library (W-BLIB) of integrals of wavelength-dependent reflectivity R of the target in a Jones framework over a range of radiation source wavelengths λ; training (TRN) (410) the wide-band library; and determining (412), using the trained wide-band library, an estimated intensity (INT) of radiation scattered by the target illuminated by the radiation source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.