Multi-controller inspection system
US11415526B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2020 |
| Grant date | Aug 16, 2022 |
| Priority date | — |
| Expiry date | Dec 29, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system is disclosed. The inspection system includes a shared memory configured to receive image data from a defect inspection tool and a controller communicatively coupled to the shared memory. The controller includes a host image module configured to apply one or more general-purpose defect-inspection algorithms to the image data using central-processing unit (CPU) architectures, a results module configured to generate inspection data for defects identified by the host image module, and secondary image module(s) configured to apply one or more targeted defect-inspection algorithms to the image data. The secondary image module(s) employ flexible sampling of the image data to match a data processing rate of the host image module within a selected tolerance. The flexible sampling of the image data is adjusted responsive to the inspection data generated by the results module and the host image module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.