Patent · US Active

Spiraling polyphase electrodes for electrostatic chuck

US11417557B2 · kind B2 · utility

0Cited by

6References

20Claims

0Family size

Assignee

ENTEGRIS, INC. · US

Inventors

Chun Wang Chan · Cambridge, US
Jakub Rybczynski · Arlington, US
Yan Liu · Meishan City, CN

Key dates

Filing date	Dec 15, 2020
Grant date	Aug 16, 2022
Priority date	—
Expiry date	Dec 15, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68785
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Electrostatic chucks include multiple electrodes, each having a spiral shape surrounding a center of a surface of the electrostatic chuck, to provide a polyphase electrostatic chuck. Each electrode can be connected to a different phase of power. The spiral shapes can each avoid one another as well as avoiding holes or openings in the surface of the electrostatic chuck. The spiral shapes can be algorithmically determined using a processor. These electrostatic chucks can include three or more electrodes. Methods of manufacture of the electrostatic chucks include determining shapes for each of the electrodes and providing each of the electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.