Inorganic piezoelectric materials formed on fibers and applications thereof
US11421376B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2016 |
| Grant date | Aug 23, 2022 |
| Priority date | — |
| Expiry date | Mar 3, 2039 |
Classification
- Technology area (CPC D)Textiles; Paper
- CPC primaryD01F11/00
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Embodiments of the invention include an active fiber with a piezoelectric layer that has a crystallization temperature that is greater than a melt or draw temperature of the fiber and methods of forming such active fibers. According to an embodiment, a first electrode is formed over an outer surface of a fiber. Embodiments may then include depositing a first amorphous piezoelectric layer over the first electrode. Thereafter, the first amorphous piezoelectric layer may be crystallized with a pulsed laser annealing process to form a first crystallized piezoelectric layer. In an embodiment, the pulsed laser annealing process may include exposing the first amorphous piezoelectric layer to radiation from an excimer laser with an energy density between approximately 10 and 100 mJ/cm2 and pulse width between approximately 10 and 50 nanoseconds. Embodiments may also include forming a second electrode over an outer surface of the crystallized piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.