Wafer pedestal with contact array
US11437253B2 · kind B2 · utility
0Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 2020 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Jul 8, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01R13/2407
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention provides a wafer heating pedestal including a shaft connected to a bottom of a plate. The shaft holds a contact array being in contact with plural contact pads of the plate. The contact array includes plural contact columns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.