Junichi Arami
38Patents
20h-index
64Co-inventors
88Inventor score
Filing activity: Jul 17, 1991 → Apr 21, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6156151A | Plasma processing apparatus | Electricity | 421 | Expired |
| US6035804A | Process chamber apparatus | Chemistry; Metallurgy | 408 | Expired |
| US5591269A | Vacuum processing apparatus | Chemistry; Metallurgy | 285 | Expired |
| US5575853A | Vacuum exhaust system for processing apparatus | Chemistry; Metallurgy | 163 | Expired |
| US5958140A | One-by-one type heat-processing apparatus | Electricity | 159 | Expired |
| US5542559A | Plasma treatment apparatus | Electricity | 143 | Expired |
| US5275683A | Mount for supporting substrates and plasma processing apparatus using the same | Emerging Cross-Sectional Technologies | 83 | Expired |
| US5290381A | Plasma etching apparatus | Electricity | 76 | Expired |
| US7273526B2 | Thin-film deposition apparatus | Chemistry; Metallurgy | 62 | Expired |
| US5539179A | Electrostatic chuck having a multilayer structure for attracting an object | Emerging Cross-Sectional Technologies | 61 | Expired |
| US5250137A | Plasma treating apparatus | Electricity | 56 | Expired |
| US5255153A | Electrostatic chuck and plasma apparatus equipped therewith | Electricity | 55 | Expired |
| US6014943A | Plasma process device | Electricity | 52 | Expired |
| US5240556A | Surface-heating apparatus and surface-treating method | Electricity | 48 | Expired |
| US5221403A | Support table for plate-like body and processing apparatus using the table | Electricity | 46 | Expired |
| US5665260A | Ceramic electrostatic chuck with built-in heater | Electricity | 44 | Expired |
| US5904872A | Heating device, method of manufacturing the same, and processing apparatus using the same | Emerging Cross-Sectional Technologies | 39 | Expired |
| US5660671A | Magnetron plasma processing apparatus and processing method | Electricity | 29 | Expired |
| US5938850A | Single wafer heat treatment apparatus | Electricity | 29 | Expired |
| US5234527A | Liquid level detecting device and a processing apparatus | Electricity | 20 | Expired |
| US5566043A | Ceramic electrostatic chuck with built-in heater | Electricity | 19 | Expired |
| US7717061B2 | Gas switching mechanism for plasma processing apparatus | Emerging Cross-Sectional Technologies | 18 | Active |
| US6764575B1 | Magnetron plasma processing apparatus | Electricity | 16 | Expired |
| US5618350A | Processing apparatus | Chemistry; Metallurgy | 13 | Expired |
| US5376211A | Magnetron plasma processing apparatus and processing method | Electricity | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.