Testing apparatus
US11442096B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 2021 |
| Grant date | Sep 13, 2022 |
| Priority date | — |
| Expiry date | Feb 5, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A testing apparatus includes multiple testing units arrayed in a first axial direction in plan view, the multiple testing units being configured to respectively press probes against electronic devices on chucks to test the electronic devices, multiple gas circulating units respectively disposed in areas each corresponding to one or more testing units among the multiple testing units, the multiple gas circulating units respectively including first fans configured to circulate a gas in the areas along a second axial direction in plan view, multiple temperature detecting units configured to respectively detect temperatures of the chucks, and a controller configured to control drive of the first fans of the multiple gas circulating units based on the detected temperatures of the chucks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.