Robot for simultaneous substrate transfer

US11443973B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Jason M. Schaller · Austin, US
• Luke Bonecutter · Cedar Park, US
• Charles T. Carlson · Cedar Park, US
• Rajkumar Thanu · Santa Clara, US
• Karuppasamy Muthukamatchi · Madurai, IN
• Jeff Hudgens · San Francisco, US
• Benjamin B. Riordon · Newburyport, US

Key dates

• Filing date: Jul 7, 2020
• Grant date: Sep 13, 2022
• Expiry date: Jul 7, 2040

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B65G47/907
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft counter-rotatable with the first shaft. The transfer apparatus may include an eccentric hub extending at least partially through the central hub, and which is radially offset from a central axis of the central hub. The transfer apparatus may also include an end effector coupled with the eccentric hub. The end effector may include a plurality of arms having a number of arms equal to the number of substrate supports of the plurality of substrate supports.