Retaining ring having inner surfaces with features

US11453099B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Steven Mark Reedy · San Ramon, US
• Simon Yavelberg · Cupertino, US
• Jeonghoon Oh · San Jose, US
• Steven M. Zuniga · Soquel, US
• Andrew J. Nagengast · Sunnyvale, US
• Samuel Chu-Chiang Hsu · Palo Alto, US
• Gautam Shashank Dandavate · Sunnyvale, US

Key dates

• Filing date: Dec 9, 2019
• Grant date: Sep 27, 2022
• Expiry date: Dec 19, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68721
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.