Inventor · Cupertino, CA, US

Simon Yavelberg

36Patents
7h-index
62Co-inventors
72Inventor score

Filing activity: Jun 15, 1995 → Apr 3, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6326597A Temperature control system for process chamber Electricity 603 Expired
US6367410B1 Closed-loop dome thermal control apparatus for a semiconductor wafer processing system Electricity 567 Expired
US7044832B2 Load cup for chemical mechanical polishing Performing Operations; Transporting 32 Expired
US5767781A Method for detection of failed heater in a daisy chain connection Physics 16 Expired
US7241203B1 Six headed carousel Performing Operations; Transporting 14 Active
US5775379A Insulation jacket for fluid carrying conduits Mechanical Engineering; Lighting; Heating 8 Expired
US9339914B2 Substrate polishing and fluid recycling system Electricity 7 Active
US10500695B2 Retaining ring having inner surfaces with features Electricity 6 Active
US5641359A Process gas delivery system Electricity 5 Expired
US9403256B2 Recording measurements by sensors for a carrier head Performing Operations; Transporting 3 Active
US6369493B1 Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket Electricity 2 Expired
US9878421B2 Chemical mechanical polishing retaining ring with integrated sensor Performing Operations; Transporting 2 Active
US8250695B2 Roller assembly for a brush cleaning device in a cleaning module Performing Operations; Transporting 2 Active
US5716877A Process gas delivery system Electricity 2 Expired
US11453099B2 Retaining ring having inner surfaces with features Electricity 2 Active
US10553473B2 Edge ring for a substrate processing chamber Performing Operations; Transporting 1 Active
US10029346B2 External clamp ring for a chemical mechanical polishing carrier head Performing Operations; Transporting 1 Active
US10946496B2 Chemical mechanical polishing retaining ring with integrated sensor Performing Operations; Transporting 1 Active
US10290459B2 Magnetron having enhanced cooling characteristics Emerging Cross-Sectional Technologies 1 Active
US10656100B2 Surface acoustic wave sensors in semiconductor processing equipment Electricity 0 Active
US9731399B2 Coated retaining ring Chemistry; Metallurgy 0 Active
US11446740B2 Multiple sequential linear powder dispensers for additive manufacturing Emerging Cross-Sectional Technologies 0 Active
US10141153B2 Magnetron having enhanced cooling characteristics Emerging Cross-Sectional Technologies 0 Active
US12330260B2 Polishing pad with secondary window seal Performing Operations; Transporting 0 Active
US12048981B2 Retaining ring having inner surfaces with features Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.