Gas-phase reactor system including a gas detector
US11453946B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2020 |
| Grant date | Sep 27, 2022 |
| Priority date | — |
| Expiry date | Apr 7, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods of and systems for performing leak checks of gas-phase reactor systems are disclosed. Exemplary systems include a first exhaust system coupled to a reaction chamber via a first exhaust line, a bypass line coupled to a gas supply unit and to the first exhaust system, a gas detector coupled to the bypass line via a connecting line, a connecting line valve coupled to the connecting line, and a second exhaust system coupled to the connecting line. Methods include using the second exhaust system to exhaust the connecting line to thereby remove residual gas in the connecting line that may otherwise affect the accuracy of the gas detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.