Inventor · Hwaseong-si, KR

HakYong Kwon

7Patents
1h-index
11Co-inventors
37Inventor score

Filing activity: Nov 1, 2019 → Oct 17, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US11251040B2 Cyclical deposition method including treatment step and apparatus for same Electricity 1 Active
US11866823B2 Substrate supporting unit and a substrate processing device including the same Electricity 0 Active
US12195855B2 Gas-phase reactor system including a gas detector Physics 0 Active
US11453946B2 Gas-phase reactor system including a gas detector Physics 0 Active
US11499226B2 Substrate supporting unit and a substrate processing device including the same Electricity 0 Active
US11345999B2 Method of using a gas-phase reactor system including analyzing exhausted gas Physics 0 Active
US11814728B2 Method for filling a gap in a three-dimensional structure on a semiconductor substrate Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.