Measurement method and measuring jig
US11456199B2 · kind B2 · utility
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5References
10Claims
0Family size
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Key dates
| Filing date | Dec 27, 2019 |
| Grant date | Sep 27, 2022 |
| Priority date | — |
| Expiry date | Dec 27, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a measurement method, a terminal is brought into contact with an electrode in an electrostatic chuck in contact with a substrate that is grounded. Further, the terminal, the electrostatic chuck and the substrate are fixed, and a current value and a voltage value are measured using an ammeter and a voltmeter, respectively, that are connected to the terminal. In addition, whether or not the terminal and the electrode are electrically connected is determined from a slope of the current value and/or a peak current value based on the measured current value and the voltage value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.