Tetsu TSUNAMOTO
4Patents
1h-index
4Co-inventors
30Inventor score
Filing activity: Aug 22, 2018 → Dec 11, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10720313B2 | Measuring device, measurement method, and plasma processing device | Electricity | 1 | Active |
| US11456199B2 | Measurement method and measuring jig | Electricity | 0 | Active |
| US11462431B2 | Discharging method and substrate processing apparatus | Electricity | 0 | Active |
| US11658012B2 | Control method and plasma processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.