Graphene pellicle lithographic apparatus
US11467486B2 · kind B2 · utility
2Cited by
1References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2019 |
| Grant date | Oct 11, 2022 |
| Priority date | — |
| Expiry date | May 16, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70983
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A catalyst including: a first layer including a transition metal; a base layer; and an interlayer, wherein the interlayer is disposed between the base layer and the first layer is disclosed. Also disclosed are methods for preparing a catalyst as well as for synthesizing graphene, a pellicle produced using the catalyst or methods disclosed herein, as well as a lithography apparatus including such a pellicle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.