Patent · US Active

Clean isolation valve for reduced dead volume

US11479857B2 · kind B2 · utility

0Cited by

26References

17Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Ashutosh Agarwal · Ghaziabad, IN
Sanjeev Baluja · Campbell, US

Key dates

Filing date	Sep 18, 2020
Grant date	Oct 25, 2022
Priority date	—
Expiry date	Sep 29, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3244
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Gas distribution apparatus, processing chambers and methods using a dead volume-free valve are described. The valve has a first inlet line with upstream and downstream ends and a second inlet line with a downstream end that connects to the first inlet line. A sealing surface at the downstream end of the second inlet line separates the first inlet line from the second inlet line preventing fluid communication between the first inlet line and the second inlet line.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.