Maintenance methods for polishing systems and articles related thereto
US11484987B2 · kind B2 · utility
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6References
9Claims
0Family size
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Key dates
| Filing date | Mar 9, 2020 |
| Grant date | Nov 1, 2022 |
| Priority date | — |
| Expiry date | Sep 17, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D47/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Chemically impregnated applicators used to provide hydrophobic surfaces on chemical mechanical polishing system components and related application methods. A method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.