Inventor · Burlingame, CA, US

Allen L. D'Ambra

26Patents
7h-index
53Co-inventors
72Inventor score

Filing activity: May 25, 1999 → May 11, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6440261B1 Dual buffer chamber cluster tool for semiconductor wafer processing Emerging Cross-Sectional Technologies 413 Expired
US8308529B2 High throughput chemical mechanical polishing system Performing Operations; Transporting 41 Active
US7223323B2 Multi-chemistry plating system Electricity 31 Expired
US7155319B2 Closed loop control on liquid delivery system ECP slim cell Emerging Cross-Sectional Technologies 13 Expired
US6454927B1 Apparatus and method for electro chemical deposition Chemistry; Metallurgy 13 Expired
US8172643B2 Polishing system having a track Performing Operations; Transporting 10 Active
US8844546B2 Apparatus and method for cleaning semiconductor substrate using pressurized fluid Electricity 9 Active
US9227293B2 Multi-platen multi-head polishing architecture Performing Operations; Transporting 7 Active
US8869422B2 Methods and apparatus for marangoni substrate drying using a vapor knife manifold Electricity 6 Active
US8968055B2 Methods and apparatus for pre-chemical mechanical planarization buffing module Performing Operations; Transporting 6 Active
US7988535B2 Platen exhaust for chemical mechanical polishing system Performing Operations; Transporting 3 Active
US11370083B2 Pad conditioner cleaning system Electricity 2 Active
US11545371B2 Platen shield cleaning system Electricity 1 Active
US6869516B2 Method for removing electrolyte from electrical contacts and wafer touching areas Electricity 1 Expired
US7962990B2 Brush box cleaner module with force control Electricity 1 Active
US7473339B2 Slim cell platform plumbing Chemistry; Metallurgy 1 Active
US11648645B2 Pad conditioner cleaning system Electricity 1 Active
US7005046B2 Apparatus for electro chemical deposition Chemistry; Metallurgy 1 Expired
US11484987B2 Maintenance methods for polishing systems and articles related thereto Performing Operations; Transporting 0 Active
US11433436B2 Carousel for ultrasonic cleaning and method of using thereof Performing Operations; Transporting 0 Active
US12134167B2 Pad conditioner cleaning system Electricity 0 Active
US11251047B2 Clog detection in a multi-port fluid delivery system Performing Operations; Transporting 0 Active
US11756804B2 Platen shield cleaning system Electricity 0 Active
US9646859B2 Disk-brush cleaner module with fluid jet Electricity 0 Active
US11986925B2 Maintenance methods for polishing systems and articles related thereto Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.