Moisture sensor

US11486848B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Andrey Kravchenko · Dresden, DE
• Heiko Froehlich · Radebeul, DE
• Magali Glemet · Dresden, DE
• Vladislav Komenko · Dresden, DE

Key dates

• Filing date: Aug 14, 2019
• Grant date: Nov 1, 2022
• Expiry date: Feb 13, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/225
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A moisture sensor comprises a carrier element comprises an insulating material, a first and a second electrode structure at a distance from one another at the carrier element, a moisture-sensitive, dielectric layer element at a first main surface region of the carrier element and adjacent to the first and second electrode structures and a third electrode structure on a first main surface region of the moisture-sensitive, dielectric layer element, such that the moisture-sensitive, dielectric layer element is between the third electrode structure and the first electrode structure and between the third electrode structure and the second electrode structure. The first electrode structure is a first capacitor electrode and the second electrode structure is a second capacitor electrode of a measurement capacitor for capacitive moisture measurement, wherein the third electrode structure is a floating electrode structure.