Process fluid path switching in recipe operations

US11487304B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Mitesh Sanghvi · Sunnyvale, US
• Venkatanarayana Shankaramurthy · San Jose, US
• Peter Standish · San Jose, US
• Anton Baryshnikov · Santa Clara, US
• Thorsten Kril · Santa Clara, US
• Chahal Neema · Santa Clara, US
• Vishal Suresh Jamakhandi · Bengaluru, IN
• Abhijit A. Kangude · San Jose, US

Key dates

• Filing date: Jan 8, 2021
• Grant date: Nov 1, 2022
• Expiry date: Apr 25, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B2219/25257
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers: causing the process fluid to flow to the processing chamber for a first period of time corresponding to a first time value; and causing the process fluid to flow to a divert foreline of the processing chamber for a second period of time, the second period of time being based on a timestep of the operation and the time value.