Venkatanarayana Shankaramurthy
9Patents
0h-index
35Co-inventors
37Inventor score
Filing activity: Feb 2, 2016 → Sep 29, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10636684B2 | Loadlock integrated bevel etcher system | Electricity | 0 | Active |
| US10403515B2 | Loadlock integrated bevel etcher system | Electricity | 0 | Active |
| US11487304B2 | Process fluid path switching in recipe operations | Physics | 0 | Active |
| US11714430B2 | Process fluid path switching in recipe operations | Physics | 0 | Active |
| US12062567B2 | Systems and methods for substrate support temperature control | Electricity | 0 | Active |
| US11841692B2 | Variable loop control feature | Physics | 0 | Active |
| US11031262B2 | Loadlock integrated bevel etcher system | Electricity | 0 | Active |
| US11449026B2 | Variable loop control feature | Physics | 0 | Active |
| US11532525B2 | Controlling concentration profiles for deposited films using machine learning | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.