Dual speed acquisition for drift corrected, fast, low dose, adaptive compositional charged particle imaging
US11488800B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2021 |
| Grant date | Nov 1, 2022 |
| Priority date | — |
| Expiry date | Apr 27, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/221
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for drift corrected, fast, low dose, adaptive sample imaging with a charged particle microscopy system include scanning a surface region of a sample with a charged particle beam to obtain a first image of the surface region with a first detector modality, and then determining a scan strategy for the surface region. The scan strategy comprises a charged particle beam path, a first beam dwell time associated with at least one region of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a second detector modality, and at least a second beam dwell time associated with other regions of the first image, wherein the first beam dwell time is different than the second beam dwell time. The surface region of the sample is then scanned with the determined scan strategy to obtain data from the first and second detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.