Integrated test cell using active thermal interposer (ATI) with parallel socket actuation

US11493551B2 · kind B2 · utility

Assignee

• Advantest Test Solutions, Inc. · US

Inventors

• Karthik Ranganathan · San Jose, US
• Gregory Cruzan · Anaheim, US
• Samer Kabbani · San Marcos, US
• Gilberto Oseguera · San Jose, US
• Rohan Gupte · San Jose, US
• Homayoun Rezai · San Jose, US
• Kenneth Santiago · San Jose, US
• Marc Ghazvini · San Jose, US

Key dates

• Filing date: Aug 5, 2020
• Grant date: Nov 8, 2022
• Expiry date: Aug 13, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/07378
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A testing apparatus comprises a test interface board comprising a plurality of socket interface boards, wherein each socket interface board comprises: a) an open socket to hold a DUT; b) a discrete active thermal interposer comprising thermal properties and operable to make thermal contact with the DUT; c) a superstructure operable to contain the discrete active thermal interposer; and d) an actuation mechanism operable to provide a contact force to bring the discrete active thermal interposer in contact with the DUT.