Patent · US Active

Operating a particle beam device

US11501948B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Luyang Han · Heidenheim, DE
Martin Edelmann · Aalen, DE
Josef Biberger · Rottenburg a. d. Laaber, DE

Key dates

Filing date	Jun 5, 2020
Grant date	Nov 15, 2022
Priority date	—
Expiry date	Dec 21, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/30411
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of operating a particle beam device for imaging, analyzing and/or processing an object may be carried out, for example, by a particle beam device. The method may include: identifying at least one region of interest on the object; defining: (i) an analyzing sequence for analyzing the object, (ii) a processing sequence for processing the object by deformation and (iii) an adapting sequence for adapting the at least one region of interest depending on the processing sequence and/or on the analyzing sequence; processing the object by deformation according to the processing sequence and/or analyzing the object according to the analyzing sequence; adapting the at least one region of interest according to the adapting sequence; and after or while adapting the at least one region of interest, imaging and/or analyzing the at least one region of interest using a primary particle beam being generated by a particle beam generator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.