System and method for aligning a mask with a substrate

US11538706B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Alexander Lerner · Carmiel, IL
• Michael P. Karazim · San Jose, US
• Andrew J. Constant · Cupertino, US
• Jeffrey A. Brodine · Los Gatos, US
• Kim Vellore · San Jose, US
• Kevin Moraes · Fremont, US
• Roey Shaviv · Palo Alto, US

Key dates

• Filing date: Apr 14, 2020
• Grant date: Dec 27, 2022
• Expiry date: Mar 9, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/682
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An alignment module for positioning a mask on a substrate comprises a mask stocker, an alignment stage, and a transfer robot. The mask stocker houses a mask cassette that stores a plurality of masks. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer one of the one or more masks from the mask stocker to the alignment stage and position the mask over the substrate. The alignment module may be part of an integrated platform having one or more transfer chambers, a factory interface having a substrate carrier chamber and one or more processing chambers. A carrier may be coupled to a substrate within the substrate carrier chamber and moved between the processing chambers to generate a semiconductor device.