Inventor · Carmiel, IL

Alexander Lerner

99Patents
15h-index
107Co-inventors
87Inventor score

Filing activity: Oct 29, 1999 → Dec 1, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7378618B1 Rapid conductive cooling using a secondary process plane Electricity 357 Active
US8057602B2 Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Electricity 47 Active
US8222574B2 Temperature measurement and control of wafer support in thermal processing chamber Electricity 46 Active
US7739351B2 Synchronous interface to asynchronous processes Electricity 44 Active
US8516542B2 Method, system, and computer program product for facilitating communication in an interoperability network Electricity 34 Active
US7223323B2 Multi-chemistry plating system Electricity 31 Expired
US9165832B1 Method of die singulation using laser ablation and induction of internal defects with a laser Electricity 25 Active
US8453203B2 Method, system, and computer program product for facilitating communication in an interoperability network Electricity 19 Active
US8231629B2 System and method for locating of distal holes of an intramedullary nail Human Necessities 17 Active
US8260849B2 Synchronous interface to asynchronous processes Electricity 17 Active
US6955516B2 Single wafer dryer and drying methods Emerging Cross-Sectional Technologies 16 Expired
US8453196B2 Policy management in an interoperability network Electricity 16 Expired
US7754518B2 Millisecond annealing (DSA) edge protection Electricity 15 Active
US8522306B2 System, method and computer program product for implementing at least one policy for facilitating communication among a plurality of entities Electricity 15 Active
US8111978B2 Rapid thermal processing chamber with shower head Electricity 15 Active
US6736408B2 Rotary vacuum-chuck with venturi formed at base of rotating shaft Emerging Cross-Sectional Technologies 15 Expired
US6464799B1 Method for managing a fluid level associated with a substrate processing tank Electricity 14 Expired
US8453202B2 Method, system, and computer program product for facilitating communication in an interoperability network Electricity 14 Active
US8453201B2 Method, system, and computer program product for facilitating communication in an interoperability network Electricity 14 Active
US8314371B2 Rapid thermal processing chamber with micro-positioning system Electricity 14 Active
US7812286B2 Rapid conductive cooling using a secondary process plane Electricity 12 Active
US8294068B2 Rapid thermal processing lamphead with improved cooling Electricity 12 Active
US7513062B2 Single wafer dryer and drying methods Electricity 12 Expired
US8056500B2 Thermal reactor with improved gas flow distribution Electricity 12 Active
US7980255B2 Single wafer dryer and drying methods Emerging Cross-Sectional Technologies 10 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.