System and method for edge ring wear compensation
US11538713B2 · kind B2 · utility
0Cited by
8References
12Claims
0Family size
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Key dates
| Filing date | Nov 30, 2018 |
| Grant date | Dec 27, 2022 |
| Priority date | — |
| Expiry date | Apr 6, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A controller for adjusting a height of an edge ring in a substrate processing system includes an edge ring wear calculation module configured to receive at least one input indicative of one or more erosion rates of the edge ring, calculate at least one erosion rate of the edge ring based on the at least one input, and calculate an amount of erosion of the edge ring based on the at least one erosion rate. An actuator control module is configured to adjust the height of the edge ring based on the amount of erosion as calculated by the edge ring wear calculation module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.