Patent · US Active

High-voltage devices integrated on semiconductor-on-insulator substrate

US11545570B2 · kind B2 · utility

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4References
20Claims
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Assignee

Inventors

Key dates

Filing dateJan 8, 2020
Grant dateJan 3, 2023
Priority date
Expiry dateFeb 29, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/685

Abstract

The present disclosure generally to semiconductor devices, and more particularly to semiconductor devices having high-voltage transistors integrated on a semiconductor-on-insulator substrate and methods of forming the same. The present disclosure provides a semiconductor device including a semiconductor-on-insulator (SOI) substrate having a semiconductor layer, a bulk substrate and an insulating layer between the semiconductor layer and the bulk substrate, a source region and a drain region disposed on the bulk substrate, an isolation structure extending through the insulating layer and the semiconductor layer and terminates in the bulk substrate, and a gate structure between the source region and the drain region, the gate structure is disposed on the semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.