Patent · US Active

Helical plug for reduction or prevention of arcing in a substrate support

US11551960B2 · kind B2 · utility

0Cited by

11References

12Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Reyn Tetsuro WAKABAYASHI · San Jose, US
Hamid Noorbakhsh · Fremont, US
Anwar Husain · Pleasanton, US

Key dates

Filing date	Jan 30, 2020
Grant date	Jan 10, 2023
Priority date	—
Expiry date	Mar 27, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/20
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Embodiments of a plug for use in an electrostatic chuck are provided herein. In some embodiments, a plug for use in an electrostatic chuck includes a polymer sleeve having a central opening; and a core disposed in the central opening of the polymer sleeve, the core having a central protrusion and a peripheral ledge, wherein an outer surface of the core includes a helical channel extending from a lower surface of the core towards the peripheral ledge to at least partially define a gas flow path through the plug, and wherein the peripheral ledge is disposed between an upper surface of the polymer sleeve and the lower surface of the core.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.