Anwar Husain
32Patents
11h-index
43Co-inventors
75Inventor score
Filing activity: Mar 15, 1983 → Mar 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5671116A | Multilayered electrostatic chuck and method of manufacture thereof | Emerging Cross-Sectional Technologies | 83 | Expired |
| US5548470A | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | Electricity | 62 | Expired |
| US6575177B1 | Semiconductor substrate cleaning system | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6140612A | Controlling the temperature of a wafer by varying the pressure of gas between the underside of the wafer and the chuck | Electricity | 34 | Expired |
| US5880922A | Multilayered electrostatic chuck and method of manufacture thereof | Emerging Cross-Sectional Technologies | 28 | Expired |
| US5911833A | Method of in-situ cleaning of a chuck within a plasma chamber | Emerging Cross-Sectional Technologies | 25 | Expired |
| US7743730B2 | Apparatus for an optimized plasma chamber grounded electrode assembly | Electricity | 24 | Active |
| US6474712B1 | Gripper for supporting substrate in a vertical orientation | Emerging Cross-Sectional Technologies | 23 | Expired |
| US4544311A | Mask alignment apparatus | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6516816B1 | Spin-rinse-dryer | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6303895A | Method and apparatus for controlling a temperature of a wafer | Electricity | 11 | Expired |
| US10847347B2 | Edge ring assembly for a substrate support in a plasma processing chamber | Emerging Cross-Sectional Technologies | 9 | Active |
| US6406359B1 | Apparatus for transferring semiconductor substrates using an input module | Electricity | 9 | Expired |
| US8261905B2 | Wafer carrier drive apparatus and method for operating the same | Electricity | 7 | Active |
| US7226514B2 | Spin-rinse-dryer | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8584613B2 | Single substrate processing head for particle removal using low viscosity fluid | Electricity | 1 | Active |
| US9905402B2 | Plasma processing chamber with a grounded electrode assembly | Electricity | 1 | Active |
| US8161984B2 | Generator for foam to clean substrate | Emerging Cross-Sectional Technologies | 1 | Active |
| US10504765B2 | Electrostatic chuck assembly having a dielectric filler | Electricity | 1 | Active |
| US11551960B2 | Helical plug for reduction or prevention of arcing in a substrate support | Electricity | 0 | Active |
| US8739805B2 | Confinement of foam delivered by a proximity head | Chemistry; Metallurgy | 0 | Active |
| US11171030B2 | Methods and apparatus for dechucking wafers | Electricity | 0 | Active |
| US8557051B2 | Method for using generator for foam to clean substrate | Emerging Cross-Sectional Technologies | 0 | Active |
| US11543954B2 | Scroll activity detection for selection and display of information | Physics | 0 | Active |
| US12020977B2 | Lift pin assembly | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.