Michael Friedmann
43Patents
14h-index
47Co-inventors
77Inventor score
Filing activity: Dec 5, 2003 → Aug 24, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7797019B2 | Shared image database with geographic navigation | Physics | 122 | Active |
| US7242477B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 83 | Expired |
| US7317531B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 49 | Expired |
| US7656528B2 | Periodic patterns and technique to control misalignment between two layers | Electricity | 49 | Active |
| US7280212B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 34 | Expired |
| US7298481B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 34 | Expired |
| US7289213B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 33 | Expired |
| US7301634B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 24 | Expired |
| US7277172B2 | Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals | Physics | 24 | Expired |
| US7433040B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 22 | Active |
| US7385699B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 21 | Expired |
| US9476698B2 | Periodic patterns and technique to control misalignment between two layers | Electricity | 15 | Active |
| US7379183B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 14 | Expired |
| US7564557B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 14 | Active |
| US7663753B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 13 | Active |
| US7933016B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 12 | Active |
| US8525994B2 | Periodic patterns and technique to control misaligment between two layers | Electricity | 9 | Active |
| US10599712B2 | Shared image database with geographic navigation | Physics | 7 | Active |
| US7953422B2 | Shared image database with geographic navigation | Physics | 7 | Active |
| US8107975B2 | Shared image database with geographic navigation | Physics | 7 | Active |
| US11333621B2 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Electricity | 6 | Active |
| US7876440B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 6 | Active |
| US8793248B2 | Method and system for recommending Geo-tagged items | Physics | 5 | Active |
| US10365211B2 | Systems and methods for metrology beam stabilization | Physics | 5 | Active |
| US10859518B2 | X-ray zoom lens for small angle x-ray scatterometry | Physics | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.