Patent · US Active

Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry

US11561082B2 · kind B2 · utility

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6Claims

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Assignee

Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences · CN

Inventors

Peng Li · 流花街道, CN
Feng Tang · Geneva, US
Xiangzhao Wang · Shanghai, CN
Yunjun Lu · Shanghai, CN
Yang Liu · Beijing, CN

Key dates

Filing date	Nov 12, 2021
Grant date	Jan 24, 2023
Priority date	—
Expiry date	Nov 12, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01B2290/50
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Method for simultaneously compensating pupil coordinate distortion and shear amount change in a process of wavefront reconstruction in grating transverse shear interference. Where a wavefront is diffracted by a grating, the shapes and light paths of the diffracted wavefronts of all the orders are different, so that on one hand, a coordinate system detected by a detector plane is distorted relative to a pupil coordinate system, and on the other hand, a shear amount changes along with a coordinate position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.