Patent · US Active

Test arrangement for testing high-frequency components, particularly silicon photonics devices under test

US11561242B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

ADVANTEST CORPORATION · JP

Inventors

José Moreira · Stuttgart, DE
Zhan Zhang · Mountain View, US
Hubert Werkmann · Echterdingen, DE
Fabio Pizza · Longone al Segrino, IT
Paolo Mazzucchelli · Magenta, IT

Key dates

Filing date	Oct 30, 2020
Grant date	Jan 24, 2023
Priority date	—
Expiry date	Dec 2, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/311
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a probe card (PC) for use with an automatic test equipment (ATE), wherein the probe card (PC) comprises a probe head (PH) on a first side thereof, and wherein the probe card (PC) is adapted to be attached to an interface (IF) and wherein the probe card (PC) comprises a plurality of contact pads on a second side in a region opposing at least a region of the interface (IF), arranged to contact a plurality of contacts of the interface (IF), and wherein the probe card (PC) comprises one or more coaxial connectors (CCPT) arranged to mate with one or more corresponding coaxial connectors (CCPT) of the interface (IF). The invention relates further to pogo tower (PT) for connecting a wafer probe interface (WPI) of an automatic test equipment with the probe card (PC).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.