Multi-input multi-zone thermal control for device testing

US11573262B2 · kind B2 · utility

Assignee

• Advantest Test Solutions, Inc. · US

Inventors

• Karthik Ranganathan · San Jose, US
• Gregory Cruzan · Anaheim, US
• Paul Ferrari · San Jose, US
• Samer Kabbani · San Marcos, US
• Martin Fischer · Gleichen, DE

Key dates

• Filing date: Nov 19, 2021
• Grant date: Feb 7, 2023
• Expiry date: Nov 19, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2875
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disposing a DUT between a cold plate and an active thermal interposer device of the thermal management head. The DUT includes a plurality of modules and the active thermal interposer device includes a plurality of zones, each zone of the plurality of zones corresponding to a respective module of the plurality of modules and operable to be selectively heated. Receiving a respective set of inputs corresponding to each zone of the plurality of zones. Performing thermal management of the plurality of modules of the DUT by separately controlling temperature of each zone of the plurality zones by controlling a supply of coolant to a cold plate, and individually controlling heating of each zone of the plurality zones.