Carrier, laminate and method of manufacturing semiconductor devices
US11576259B2 · kind B2 · utility
0Cited by
1References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 23, 2019 |
| Grant date | Feb 7, 2023 |
| Priority date | — |
| Expiry date | Nov 26, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/68327
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier configured to be attached to a semiconductor substrate via a first surface comprises a continuous carbon structure defining a first surface of the carrier, and a reinforcing material constituting at least 2 vol-% of the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.