Patent · US Active

Carrier, laminate and method of manufacturing semiconductor devices

US11576259B2 · kind B2 · utility

0Cited by
1References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 23, 2019
Grant dateFeb 7, 2023
Priority date
Expiry dateNov 26, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2221/68327
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A carrier configured to be attached to a semiconductor substrate via a first surface comprises a continuous carbon structure defining a first surface of the carrier, and a reinforcing material constituting at least 2 vol-% of the carrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.